The waferWoRx system evaluates the probing process by analyzing probe marks with advanced image analysis software. The combined analysis of data from the prober, probe card and probe card analyzer - called "closed-loop" metrology correlation - makes it possible to prescribe corrective actions that optimize probing performance including test-at-temperature, accuracy of prober stage setup and prober to prober consistency. The validation study lets waferWoRx users know with confidence that their waferWoRx analysis is accurate and reliable.

"The waferWoRx provides a reliable way for test floor engineers to evaluate and monitor the performance of their probers and probe cards," said Bob Heiligenberg, Applied Precision's semiconductor product line manager. "This study validates what we have been seeing all along; that the waferWoRx is a reliable and accurate tool, and produces precise test results."

Larry Hendler of Hendler Enterprises and Jeff Hintzke of Electroglas conducted the validation study to measure the system's accuracy. To conduct these measurements, Hendler and Hintzke first validated the basic capability of the waferWoRx by measuring repeatability and reproducibility. They checked repeatability by measuring the same wafer five times in a row, then checked reproducibility by measuring the same wafer five times in a row on five consecutive days. Then they purposely induced stepping errors on a prober and validated the waferWoRx system's ability to measure these errors by performing regression analysis of the measurements taken with the waferWoRx compared to the known scaling errors. This regression analysis validated that the waferWoRx is both reliable and accurate.

"In the age of digital manufacturing and absolute quality assurance, probing process analysis is making a major contribution to improvement in quality and throughput, as well as reducing costs," said Jeff Hintzke, vice president of marketing for Electroglas. "Verifying the accuracy of the system that conducts the probing process analysis is an important way to ensure that fabs are using the best tools possible to increase their yield."

Applied Precision's waferWoRx Probing Process Analysis System will be on display in Booth 10536 at SEMICON West, San Jose, Calif. Reprints of the presentation are available from Applied Precision.

About Electroglas

Electroglas delivers essential tools for process management designed to enhance semiconductor companies' profitability. The Company's wafer probers, inspection systems and software solutions serve as data collection, management and analysis tools that semiconductor manufacturers depend on to improve their productivity and process control by optimizing sort-floor efficiency. Electroglas has been a leading supplier of wafer probers for over 35 years and has an installed base of more than 10,000 systems. The Company's stock trades on the Nasdaq National Market under the symbol "EGLS". The Company's World Wide Web site is located at http://www.electroglas.com.

About Hendler Enterprises

Hendler Enterprises is a consulting firm specializing in system and process characterization and metrology. The company has provided experimental and analytical expertise to many semiconductor equipment manufacturing groups in both front end and back end applications. Hendler Enterprises can be reached at (408) 528-3280.

About Applied Precision, Inc.

Applied Precision Inc. is the leading provider of measurement, analysis and process-control systems for semiconductor test, assembly and packaging, as well as biomedical and biotechnology research and analysis (especially cell microscopy, genomics and proteomics). Applied Precision's specialized systems are based on precisionware^TM, the company's unique convergence of mechanics, electronics and software, enabling advancements in the world's core technologies. Applied Precision can be reached in the United Kingdom at +44 1672 518350 or in the United States at (425) 557-1000 and can be located on the Web at www.appliedprecision.com.